Features:
Replaceable cleaning suction cups, 4-12 inch cleaning suction cups can be used;
The operating procedures can be adjusted according to the operation requirements, and the equipment operation process, cleaning time and various parameters can be compiled by themselves;
Online real-time monitoring of equipment operating status and parameters, automatic doors are equipped with safety gratings to ensure safe operation;
The vacuum adsorption cleaning plate is adopted, and the pick and place of the wafer fixture is safer and more convenient;
Swing arm cleaning, the cleaning range can be programmed, the application range is wide, no cleaning blind area, no secondary pollution, and the cleaning effect is better;
The equipment cleaning room is fully sealed and equipped with an automatic water retaining ring to effectively prevent secondary pollution;
High-speed centrifugal design, the speed can be adjusted from 100-2000R/Min;
Equipped with a unique static elimination device, the auxiliary cleaning can achieve the best effect, and nitrogen can be selected;
The equipment is equipped with a large transparent observation window;
Space-saving design with reduced width, compact structure and small footprint;
The whole machine has a mirror surface stainless steel body, which is resistant to acid and alkali, and has no pollution to the working environment. The mirror surface case is easy to maintain.